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ИСТИНА ЦЭМИ РАН |
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One-dimensional multilayer reflection gratings with different groove shapes are considered and optimized for maximum diffraction efficiency in the first order in Littrow conditions. A rigorous formulation for the design optimization problem based on merit function minimization is presented. Nelder-Mead (simplex) method is applied for minimizing the merit function. At each step the direct problem is solved by means of a combination of the incomplete Galerkin's method and matrix techniques.