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The results of numerical study of the mechanism of O2 dissociation in oxygen mixtures, excited by pulsed electron beams, are carried out. The energy efficiency of ozone production is obtained as a function of electron beam current density. The analysis of energy efficiency of ozone production in oxygen electron-beam plasmas, and comparison calculation results with available experimental data show that the reactions of O4+ ions recombination with electrons and negative ions O2- and O4- leads to the formation of two oxygen atoms. In this case the energy efficiency of O3 production сan reach GO3 = 12 – 13.