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Emission spectroscopy of dipolar plasma source in low pressure hydrogenдоклад на конференции
- Авторы: Bechu S., Shakhatov V.A., Lebedev Yu A., Lacoste A.
- Международная Конференция : IX International Workshop on Microwave Discharges: Fundamentals and Applications
- Даты проведения конференции: 7-11 сентября 2015
- Дата доклада: 7 сентября 2015
- Тип доклада: Устный
- Докладчик: Lebedev Yu A.
- Место проведения: Cordoba, Spain
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Аннотация доклада:
Method of emission spectroscopy was used to study the plasma characteristics of the dipolar plasma source in hydrogen at pressures 0.001 – 0.01 Torr, microwave power 200-1200 W, microwave frequency 2.45 GHz. Spectral composition of plasma emission was investigated in the range of wave length 601–627 nm. Functions of distributions over rotational (J=1–5) and vibrational (v=0–2) levels were determined for excited state d3Пu of hydrogen molecules. Gas temperature Tg, rotational Trot(d3Пu) and vibrational Tv(X1+g) temperatures were determined on the basis of collisional-radiative models.
- Добавил в систему: Шахатов Вячеслав Анатольевич