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It was ascertained recently, that formation of negative ion fluxes (AlF4 - , Al2F7 - , NaAl2F8 - ) from vapour of NaF-AlF3 system is controlled by [F- ] conductivity of solid phase formed on the internal surface of effusion cell.[1] In this work the way of the formation of practically continuous layer of CeF3(s) – superionic [F- ] anions conductor – is proposed. The CeF3 layer formation is based on cerium tetrafluoride thermolysis. CeF4(s) sublimation in temperature interval 700–900 K is accompanied by its decomposition and formation of solid CeF3(s) on the surface. The composition and morphology of the surface layer was investigated by X-ray analysis and SEM/EDXS methods.