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The formation of sputtered atoms distribution with energy and angle resolution during 200 eV Ar bombardment of (001) Ni face was studied using the molecular dynamics (MD) code. We divided sputtered atoms into three groups (proper, focused and overfocused). Atoms overfocused into selected interval of azimuthal angles have initial energy between 6 and 10 eV and are divided into two subgroups. The subgroups differ one from another in initial atom energy, azimuthal and polar angles and mechanisms of surface atom scattering.