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Experimental Study of Dual Frequency RF Discharge in Argon for Different Gas Pressuresтезисы доклада
- Авторы: Braginsky O.V., Kovalev A.S., Lopaev D.V., Rakhimova T.V., Rakhimov A.T., Voloshin D.G., Vasilieva A.N.
- Сборник: Proceedings of XXVIII International Conference on Phenomena in Ionized Gases (ICPIG), Book of abstracts
- Тезисы
- Год издания: 2007
- Место издания: ICPIG-XXVIII Prague, Czech Republic
- Первая страница: 2114
- Последняя страница: 2117
- Аннотация: Experimental measurements of plasma parameters in dual frequency (DF) capacitively coupled Ar discharge were performed for gas pressure of 20, 45 and 100 mTorr and frequency relations 1.76 MHz – 81 MHz and 13.56 MHz – 81 MHz. Results on the electron concentration as a function of low-frequency source power for a fixed power of high-frequency source are presented. On the base of these results gas pressure range for the so-called “frequency decoupling” is obtained. Effect of non-additive electron density increasing and power redistribution in DF discharges is discussed.
- Добавил в систему: Лопаев Дмитрий Викторович