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Influence of deposition conditions on the composition of tantalum coatingsстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Дата последнего поиска статьи во внешних источниках: 24 января 2020 г.
- Авторы: Sapegina I.V., Goncharov O.Y., Lad’yanov V.I., Baldaev L.H.
- Журнал: Letters on materials
- Том: 9
- Номер: 1
- Год издания: 2019
- Первая страница: 22
- Последняя страница: 26
- Аннотация: In this paper, tantalum coatings obtained by the chemical vapor deposition in reactors with hot and cold walls was analyzed. Holder with a sample was putted into the tube-shaped screen to limit the interaction zone in the reaction chamber. The screens from different materials were used: one from quartz glass and the other one from the stainless steel. Induction heating was used to heat the substrates in the reactor. The inductor coil was located on the outside surface of the screen. In the case of quartz glass screen, only the holder with the sample heated which corresponds to the reactor with the cold walls. When the screen made from stainless steel was used, the heat transfer from the screen walls to the sample occurred and this corresponded to the hot wall reactor scenario. Tantalum coatings were produced on tungsten substrates by reduction of tantalum bromide with cadmium vapor. It was found out that the formation of reverse flows containing products of chemical reaction and the non-reacting reagents during deposition of coatings was possible due to the effect of ejection. As a result, in a reactor with hot walls, part of the reagents interacted with the surface of the stainless steel screen, which leads to the formation of Fe2Br4 and CrBr2, and the subsequent reduction on the substrate of not only tantalum bromide, but also iron bromide. Thus, the tantalum coating was formed on the sample during the deposition in reactor with cold walls, and the coating consisting of a mixture of Ta+ Fe2Ta was formed using a reactor with hot walls.
- Добавил в систему: Сапегина Ирина Владимировна