The Influence of Magnetron Sputtering Conditions on the Structure of Zr–Pd Coatingsстатья
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Дата последнего поиска статьи во внешних источниках: 14 октября 2020 г.
Аннотация:Using the method of DC magnetron sputtering, nonstructured amorphous metal coatings ofZr75Pd25 composition were obtained with an average deposition rate of 1.3 nm/s at a substrate temperature of40°C, while crystalline coatings were formed at a higher substrate temperature. A crystalline coating withequilibrium phase composition was obtained at 350°C. Coatings deposited at intermediate temperatures containedpredominantly a PdZr phase, in contrast to the equilibrium PdZr2 phase. The surface roughness ofamorphous coatings was on a level of 0.2–0.5 nm, which was about ten times lower than the mean roughnessof crystalline coatings with the same composition.