Residual Stresses in Soft Magnetic FeTiB and FeZrN Films Obtained by Magnetron Deposition

Tedzhetov, V.A.; Sheftel, E.N.; Harin, E.V.; Kiryukhantsev-Korneev, P.V.

Авторы: Tedzhetov Valentin A., Sheftel Elena N., Harin Eugene V., Kiryukhantsev-Korneev Philipp V.
Журнал: Coatings
Том: 11
Номер: 1
Год издания: 2021
Издательство: MDPI
Местоположение издательства: Basel, Switzerland
Первая страница: 1
Последняя страница: 9
Номер статьи: 34
DOI: 10.3390/coatings11010034
Аннотация: The coercive field of soft magnetic ferromagnets is a structure-sensitive property and, in particular, is substantially affected by residual stresses. In the present study, the phase and structural states and residual stresses of the FeTiB and FeZrN films of various compositions, which were prepared by magnetron deposition on glass substrates and subsequent 1-h annealing at temperatures of 200–600C, were investigated by X-ray diffraction. The formation of a nanocrystalline structure is observed. It comprises different phases having different lattice parameters and unit-cell volumes and is characterized by high level of microstrains of grains as well; the microstrains predetermine the formation of high compressive stresses in the deposited films. As the annealing temperature increases, the compressive stresses decrease, and, at certain temperatures, gradually the films transform into thermal tensile stresses, which are induced by the difference in the thermal expansion coefficients of the film and substrate. Thus, the heat treatment is the efficient way to improve the soft magnetic properties of the studied class of film materials produced by magnetron deposition.
Добавил в систему: Харин Евгений Васильевич

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Residual Stresses in Soft Magnetic FeTiB and FeZrN Films Obtained by Magnetron Depositionстатья

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