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Plasma Cleaning of KU-1 Optical Quartz from Aluminum Filmsстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 6 октября 2021 г.
- Авторы: Gorodetsky А.Е., Markin A.V., Bukhovets V.L., Zolotarevsky V.I., Zalavutdinov R.Kh, Mukhn E.E., Razdobarin A.G.
- Журнал: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
- Том: 15
- Номер: 4
- Год издания: 2021
- Издательство: Pleiades Publishing, Ltd
- Местоположение издательства: Road Town, United Kingdom
- Первая страница: 660
- Последняя страница: 670
- DOI: 10.1134/S1027451021040054
- Аннотация: The intensity of light emitted by plasma and passing through diagnostic quartz windows in toka-maks and other fusion power devices may decrease due to first-wall materials (Be in the International Ther-monuclear Experimental Reactor (ITER)) sputtered and re-deposited onto the window surface facing theplasma. In the experiments, aluminum films (analog of Be) are removed from the surface of fused silica KU-1in plasma of a HF discharge in a H2–N2 mixture prototyping one of the in-situ cleaning techniques. Theadmixture of nitrogen to hydrogen plasma increases the sputtering rate of aluminum films. Using X-ray pho-toelectron spectroscopy (XPS) and atomic-force microscopy (AFM), we demonstrate that cleaning isaccompanied by the weak reduction of quartz, nitriding with the addition of nitrogen, and the formation of a“honeycomb” structure with increased roughness. These processes are more pronounced with the repeateddeposition of Al and subsequent cleaning. Light transmittance in the range 400–1000 nm does not changewithin 1% in the case of a partial change in the stoichiometry of the surface layers and an increase in theroughness from 1.3 to 4.5 nm. Numerical estimates of the forward and backscattering of light by a roughquartz surface show that the reduction in transmission due to scattering does not exceed a few tenths of a per-cent, which is in agreement with the measurement data. Thus, the demonstrated stability of the quartz trans-mittance during the deposition of aluminum and subsequent long exposure in the plasma of a HF dischargemakes it possible to consider the cleaning technique under consideration promising for use in the the ITER.
- Добавил в систему: Буховец Валентин Леонидович