Formation of nanogaps in electrochemically deposited films of metals by the stress relaxation methodстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:Formation of a set of planar electrodes spaced about 10 nm apart by electrochemical "healing" of gaps 50 to 100 nm wide in half-finished electrodes is described. The method consists in complete healing of the gap followed by the creation of a discontinuity at the joint of the electrodes via relaxation of stresses arising in the course of film deposition.