Аннотация:Single-crystal diamond microneedles were extracted from (001) textured polycrystalline films. The films were
produced using a plasma enhanced chemical vapor deposition (CVD) from a CH4/H2 gas mixture activated by a
direct current discharge. The as-grown textured polycrystalline CVDfilms consist of pyramid-shaped micrometer
size diamond crystallites embedded into a nanodiamond ballas-like material. The less ordered fraction of the CVD
film material was removed selectively using thermal oxidation. A dependence of the diamond needle shape on
the CVD and the oxidation process parameterswas revealed via a computer simulation and experimental studies.
Ability for mass production of the diamond microneedles of different shapeswas demonstrated. The needles are
suitable for various applications from microcutting tools to quantum information processing.