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Search and Recognition of the Studied Area in Probe Microscopy Using Markings Applied by Power Lithography or Nanoindentationстатья
- Авторы: Gulyaev P.V., Shelkovnikov E.Yu
- Журнал: Optics and Spectroscopy (English translation of Optika i Spektroskopiya)
- Том: 130
- Номер: 7
- Год издания: 2022
- Издательство: Optical Society of America
- Местоположение издательства: United States
- DOI: 10.1134/S0030400X22070049
- Аннотация: This paper describes processes of search and recognition of a marked zone in scanning probemicroscopy. Reference marks applied using a nanoindenter or a probe microscope cantilever are considered as marking. Typical images of reference marks are presented. Possibilities of a freely distributable software for distinguishing and recognition of reference marks on different types of images are considered. It is shown that some binarization methods and the cross-correlation method of template matching are suitable for referencing of marks. These methods turn out to be effective provided that algorithms of key point filtering are developed; it is proposed to use local extreme values of the correlation function as key points. An algorithm of such filtering based on varying threshold values of the correlation coefficient and size of the key point neighborhood is presented. The method of structural analysis based on determination of distances between key points of the image is proposed for recognizing reference marks. The results of recognition for various types of images are presented.
- Добавил в систему: Гуляев Павел Валентинович