Аннотация:The study presents the technology of the formation of amorphous ta-C films, deposited by pulsed vacuum-arc method with the use of a water-cooled electromagnetic Venetian blind plasma filter. The effect of the substrate bias voltage, in the range of -25 to -200 V, on the structural and surface properties of ta-C coatings was analyzed. The strong correlation between surface properties of amorphous ta-C films depending on substrate bias voltage variations and characteristic changes in the content of the diamond-like sp3 fraction was observed.