Structural transformations in Sc/Si multilayers irradiated by EUV lasers

Авторы: Voronov Dmitriy L., Zubarev Evgeniy N., Pershyn Yuriy P., Sevryukova Victoriya A., Kondratenko Valeriy V., Vinogradov Alexander V., Artioukov Igor A., Uspenskiy Yuriy A., Grisham Michael, Vaschenko Georgiy, Menoni Carmen S., Rocca Jorge J.
Сборник: Soft X-Ray Lasers and Applications VII
Серия: PROCEEDINGS OF SPIE
Том: 6702
Год издания: 2007
Место издания: SPIE
Номер статьи: 67020U
DOI: 10.1117/12.732705
Аннотация: Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hν; = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.
Добавил в систему: Артюков Игорь Анатольевич

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