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Light beamshaping and homogenization (lsbh) by irregular microlens structure for medical applicationsстатья
- Авторы: Semchishen V., Mrochen M., Seminogov V., Panchenko V., Seiler T.
- Сборник: Proceedings of SPIE - The International Society for Optical Engineering
- Том: 3152
- Год издания: 1998
- Первая страница: 28
- Последняя страница: 33
- DOI: 10.1117/12.306065
- Аннотация: Purpose: The increasing interest in a homogeneous Gaussian light beam profile for applications in ophthalmology i.g. photorefractive keratectomy (PRK) requests simple optical systems with low energy losses. Therefore, we developed the Light Shaping Beam Homogenizer (LSBH) working from UV up to mid-IR.Method: The irregular microlenses structure on a quartz surface was fabricated by using photolithography, chemical etching and chemical polishing processes. This created a three dimensional structure on the quartz substrate characterized in case of a Gaussian beam by random law distribution of individual irregularities tilts. The LSBH was realized for the 193 nm and the 2,94 μm wavelengths. Simulation results obtained by 3-D analysis for an arbitrary incident light beam were compared to experimental results.Results: The correlation to a numerical Gaussian fit is better than 94 % with high uniformity for an incident beam with an intensity modulation of nearly 100%...
- Добавил в систему: Панченко Владислав Яковлевич