Nanofabrication of nanostructure lattices: from high-quality large patterns to precise hybrid units

Авторы: Ma Rui, Zhang Xiaodan, Sutherland Duncan, Bochenkov Vladimir, Deng Shikai
Журнал: International Journal of Extreme Manufacturing
Том: 6
Номер: 6
Год издания: 2024
Номер статьи: 062004
DOI: 10.1088/2631-7990/ad6838
Аннотация: Sub-wavelength nanostructure lattices provide versatile platforms for light control and the basis for various novel phenomena and applications in physics, material science, chemistry, biology,and energy. The thriving study of nanostructure lattices is building on the remarkable progressof nanofabrication techniques, especially for the possibility of fabricating larger-area patternswhile achieving higher-quality lattices, complex shapes, and hybrid materials units. In thisreview, we present a comprehensive review of techniques for large-area fabrication of opticalnanostructure arrays, encompassing direct writing, self-assembly, controllable deposition, andnanoimprint/print methods. Furthermore, a particular focus is made on the recent improvementof unit accuracy and diversity, leading to integrated and multifunctional structures for devices and applications.
Добавил в систему: Боченков Владимир Евгеньевич

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