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Micromarking Device for Samples Based on an Engraving Machineстатья
- Авторы: Шелковников Е.Ю., Гуляев П.В., Ермолин К.С.
- Журнал: Instruments and Experimental Techniques
- Том: 67
- Номер: 5
- Год издания: 2024
- Издательство: Pleiades Publishing, Ltd
- Местоположение издательства: Road Town, United Kingdom
- Первая страница: 1018
- Последняя страница: 1023
- DOI: 10.1134/S0020441224701665
- Аннотация: Abstract—The article relates to the field of contact power nano- and microlithography used for marking samplesand surface areas examined with high-resolution microscopes. The device of a marking machine built onthe basis of a commercially available Generic-CNC2418 engraving machine with program control in G-codesand using a tungsten probe as a working tool is described. A process for operating the motors of the markingmachine based on the monitoring of the probe-surface contact by means of an optical microscope isdescribed. The marking obtained with the help of such a probe is a pattern of individual probe imprints.The marker drives ensure positioning accuracy of 10 microns. The transverse size of the resulting markingprints is 10–15 microns. The marker is recommended for use on surfaces with a roughness of Ra no more than0.1 microns and a Mohs hardness of no more than 7.5.
- Добавил в систему: Гуляев Павел Валентинович