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Thermodynamic mechanism of the intermixing of multilayered structures in the SiOx/SiO2 superlattices with nanometer thick layersстатья
Информация о цитировании статьи получена из
Web of Science
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 12 февраля 2018 г.
- Авторы: Andrey Sarikov, Denis Zhigunov
- Журнал: Materials Today Communications
- Том: 13
- Год издания: 2017
- Издательство: Elsevier Ltd.
- Местоположение издательства: Amsterdam, Netherlands
- Первая страница: 163
- Последняя страница: 169
- DOI: 10.1016/j.mtcomm.2017.10.001
- Аннотация: In this paper, a thermodynamic model of the behavior of superlattices consisting of alternating Si-rich oxide (SiOx) and SiO2 layers, during high temperature annealing, is presented. It is demonstrated that complete layer intermixing and breakdown of superlattice structure are expected in such superlattices at specific relations between the thicknesses of neighboring layers and for definite SiOx stoichiometries. The mechanism of this process is related to the decrease of the Gibbs free energy of intermixed superlattice state as compared to initial one if the higher kinetic efficiency condition of layer intermixing over SiOx phase separation is satisfied. The intermixing behavior of the Si oxide based superlattices is studied as a function of the initial characteristics of superlattice and the annealing temperature. The criteria for the complete layer intermixing are established. The correspondence between theoretical predictions and experimental data is discussed in terms of the borderline character of the SiOx and SiO2 layer interaction during annealing.
- Добавил в систему: Жигунов Денис Михайлович
Прикрепленные файлы
| № | Имя | Описание | Имя файла | Размер | Добавлен |
|---|---|---|---|---|---|
| 1. | Полный текст | 2017_MatTodayComm.pdf | 556,8 КБ | 7 октября 2017 [zhigunov] |