Аннотация:We have conducted a spectroscopic investigation of 167Er3+ ions in optical waveguides on an optical transition between the hyperfine sublevels of 4I15/2 and 4I9/2 multiplets. Waveguides with diameters ranging from 20 to 100 µm were produced in the crystal by a femtosecond laser using the depressed-cladding approach. The spectroscopy results of 167Er3+ ions inside the waveguides show additional broadening and an overall shifts of the spectra compared to the bulk spectrum of ions. The sign of the observed frequency shift depends on the diameter of the specific waveguide. We have also observed a two-pulse photon echo in several waveguides. The acquired results show the possibility for integrated quantum schemes in rare-earth ions doped crystals.