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Статьи в журналах
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- 2015 Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and Their effect on low-k materials
- el Otell Z., Šamara V., Zotovich A., Hansen T., de Marneffe J.F., Baklanov M.R.
- в журнале Journal of Physics D - Applied Physics, издательство IOP Publishing ([Bristol, UK], England), том 48, № 39, с. 395202 DOI
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- 2015 Experimental and theoretical study of RF capacitively coupled plasma in Ar–CF4–CF3I mixtures
- Proshina O.V., Rakhimova T.V., Lopaev D.V., Samara V., Baklanov M.R., de Marneffe J-F
- в журнале Plasma Sources Science and Technology, издательство IOP Publishing ([Bristol, UK], England), том 24, с. 055006 DOI