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Статьи в журналах
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- 1998 Comparative study of resist heating and proximity effect influence on CD variation in 30 kV EBL
- Babin S., Hudek P., Kostic I., Kuzmin I.Yu
- в журнале Proceedings of SPIE - The International Society for Optical Engineering, издательство SPIE, the International Society for Optical Engineering (Bellingham, WA, United States), том 3331, с. 83
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- 1998 Preparation of ultra-sharp diamond tip emitters by ion beam etching
- Givargizov E.I., Stepanova A.N., Mashkova E.S., Molchanov V.A., Shi F., Hudek P.
- в журнале Microelectronic Engineering, издательство Elsevier BV (Netherlands), том 41, с. 499-502
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- 1997 CD-Variation in 30 kV EBL due to Resist Heating: Experiment and Simulation
- Babin S., Hudek P., Kostic I., Kuzmin I.Yu
- в журнале Proceedings of SPIE - The International Society for Optical Engineering, издательство SPIE, the International Society for Optical Engineering (Bellingham, WA, United States), том 3048, с. 368