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Статьи в журналах
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- 2022 Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission
- Zotovich Alexey I., Zyryanov Sergey M., Lopaev Dmitry V., Rezvanov Askar A., Attallah Ahmed G., Liedke Maciej O., Butterling Maik, Bogdanova Maria A., Vishnevskiy Alexey S., Seregin Dmitry S., Vorotyntsev Dmitry A., Palov Alexander P., Hirschmann Eric, Wagner Andreas, Naumov Sergej, Vorotilov Konstantin A., Rakhimova Tatyana V., Rakhimov Alexander T., Baklanov Mikhail R.
- в журнале ACS Applied Electronic Materials, издательство American Chemical Society (United States), том 4, № 6, с. 2760-2776 DOI