Bulletin of the American Physical Society, 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas, October4-8 2010, Paris, Franceсборник

Статьи, опубликованные в сборнике

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• • 2010 In-Line Plasma Cleaning of EUV Multilayer Mirrors
  • Malykhin E.M., Braginsky O.V., Kovalev A.S., Lopaev D.V., Rakhimov A.T., Rakhimova T.V., Vasilieva A.N., Zyryanov S.M., Koshelev K.N., Krivtsun V.M., Yakushev O.F.
  • в сборнике Bulletin of the American Physical Society, 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas, October4-8 2010, Paris, France, серия 7, место издания Paris, France, том 55